aBeam Technologies offers a variety of products to improve semiconductor manufacturing and nanofabrication. Our software aids in the simulation and optimization of nanolithography, mask-making, metrology and defect inspection, as well as in the design and optimization of semiconductor equipment. We also sell SEM pattern generators.
Top Level Photomasks
Our software simulates and optimizes electron beam lithography, including charging placement error, resist heating, as well as resist exposure and development. [more...]
Electron Beam Lithography
Our products include simulation tools to understand and optimize electron scattering, charging, heating, energy deposition, resist development etc. [more...]
Test Chips
The company manufactures custom test chips and has a variety of off-the-shelf test chips.The sizes are from 5 mm to 300 mm wafers. Minimum feature size for a fabricated unique pseudo-random test chip is 1.5 nm.
SEM Pattern Generators
Convert your Scanning Electron Microscope into a nanofabrication tool with an advanced pattern generator. [more...]