Software


Input parameters include the electron beam voltage and current, writing strategy, physical constants of the resist and substrate, and the electron flash composition of the pattern. All these parameters can be introduced through an easy-to-use graphical interface.
	Target Each layer: thickness thermal constants (embedded library is available) mass density
	Beam accelerating voltage beam current density proximity parameters Monte Carlo is available
	Pattern positions and sizes of electron flashes their sequence of exposure exposure times or doses delays between flashes, topological elements, and subfields

Simulation Order

There are a few kinds of Orders that can simulate temperature rise T(x, y, z, time)