aBeam Technologies:

Our products help optimize top-level semiconductor processes and nanofabrication

aBeam Technologies offers a wide variety of products to improve semiconductor manufacturing and nanofabrication. Our software aids in the simulation and optimization of nanolithography, metrology, mask-making, and defect inspection, as well as in the design and optimization of semiconductor equipment. We also sell photomasks and SEM functionality extension tools, and provide nanofabrication services.

Top-Level Masks

Our software optimizes electron beam lithography, including feature linearity, shot noise, heating, and charging placement error. Other products optimize chrome etch and metrology for masks. [more...]


We offer low-priced, high quality photolitography masks with critical dimensions down to 1µm. Masks from 4" to 32" in size can be manufactured... [more...]


Our software optimizes and calibrates CD-SEM, automatically analyses SEM images, and simulates optical scatterometry. [more...]

Electron Beam Lithography

Our products include simulation tools to understand and optimize electron interactions with materials, electron scattering, charging, heating, energy deposition, etc. [more...]


We undertake micro/nano-fabrication projects involving a variety of techniques. We develop products in quantities ranging from a prototype to pilot production in the shortest time possible. [more...]

Dry Etch

Our software simulates the dynamics of etch profiles, including trenching, footing, dispersion, and microloading. The software can also handle complex processes such a double patterning, MEMS etch, etc. [more...]

Test Chips

The company manufactures custom test chips. We also carry a standard Beametr chip, used to measure the electron beam spot size. [more...]

SEM Functionality Enhancement Tools

Convert your Scanning Electron Microscope into a nanofabrication tool with an advanced pattern generator and add a high accuracy stage and beam blanker. [more...]